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- Max Flow Rate (L/min) : 25L/min
- Outlet connection : 9/16-18UNF
- Fluid : Ar gas, CO2 gas. Liquid is impossible
- Mixed accuracy : plus or minus1%abs
- Standard Mixing Rate : Ar : [[CO2]]=80 : 20
- Mixing Rate Scale Range : 5 to 30% [[CO2]]
- Mixing Rate Setting Precision : plus or minus1% abs
- Flow Rate Scale Range : 15 to 25L/min
- Inlet Pressure Range : 0.3 to 0.5MPa
- Inlet Pressure Setting : Ar Gas, [[CO2]] gas are set to the same pressure
- Maximum Durable Pressure : 0.5MPa
- Check Valve : Check valves built-in to piping connection ports of each inlet side
- Fine Particle Countermeasures : Metal mesh (phi0.06 x 150 mesh)filters built-in to piping connection ports of each inlet side
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